Researchers from CEMES/CNRS, Leti/CEA and STMicroelectronics have written and edited a book presenting in a simple and practical way the new quantitative techniques based on TEM which have recently been invented or developed to address most of the main challenging issues scientist and process engineers have to face to develop and optimize semiconductor devices.

More info : http://www.iste.co.uk/index.php?f=a&ACTION=View&id=529